Handles 2", 4", 5", 6", 8", 12" in diameter; 50 to 1000 micron in thickness
For circular, square and rectangular shape substrates or with carriers
Bridge type for 2"-12" Software-driven or manual adustable (minimal change-over)
For standard, semi- and transparent wafers
Works with 4-axis robot (one-axis)
Works with 3-axis robot (Self-centering and notch-finding)
With lifting pin for blade type end-effector
Without lifting pin for horseshoe type end-effector
Standard precision
High precision (sub 10 micron accuracy)
Wet
High Temperature
Chemical fumed environment
Spec | Standard | high precison |
---|---|---|
Repeatability | Centering: +/-50 micron Angular: 0.05 deg |
Centering: +/-10 micron Angular: 0.015 deg |
Speed | 1-2.5 sec | 2~3 sec |
Mechanical Interface | Bottom-mount | Bottom-mount |
Electrical | 24 VDC@2.5A max | 24 VDC@2.5A max |
Vacuum | 20" Hg Min, connection 3/32" barbed | 20" Hg Min, connection 3/32" barbed |
Communication | RS-232 serial (sumbminiature DB 15) | RS-232 serial (sumbminiature DB 15) |
Control Logic | ASCII command string | ASCII command string |
Weight | ~10 lb/4.5kg | ~10 lb/4.5kg |