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12" Thin Wafer Non-Contact Handling




50-0238 BERNOULLI ALIGNER
12” EDGE GRIP/ VORTEX SUPPORT ALIGNER, REPEATABILITY ± 25μm/0.02°



50-0132 BERNOULLI END EFFECTOR
12” EDGE GRIP/ VORTEX SUPPORT END-EFFECTOR, TOP/BOTTOM APPROACH

12”, ~200μm THIN TAIKO WAFER
EFEM FOR INSPECTION

8" Thin Wafer Non-Contact Handling




50-0245 GRAVITY ALIGNER
8” EDGE GRIP/ VORTEX SUPPORT ALIGNER, REPEATABILITY ± 50μm/0.03°



50-0156 BERNOULLI END EFFECTOR
8” EDGE GRIP/ VORTEX SUPPORT END-EFFECTOR, TOP/BOTTOM APPROACH

8”, ~150μm THIN & TAIKO WAFER SORTER WITH FLIPPING
(TOP MOUNT IOSS OCR)

12" Glass Non-Contact Handling


50-0237 EDGE GRIP ALIGNER
12” EDGE GRIP ALIGNER, REPEATABILITY ± 25μm/0.02°, WITH FAST-SWAP BUFFERING



50-0023 END EFFECTOR
12” EDGE GRIP END-EFFECTOR, 3-POINT CENTERING, TOP/BOTTOM APPROACH

12” GLASS WAFER, TOP-PICK
& PLACE EFEM FOR METROLOGY
(TOP MOUNT IOSS OCR)

6" / 8" SiC Non-Contact Handling


50-0246 GRAVITY ALIGNER
6” GRAVITY ALIGNER, 100% STRESS FREE, WITH 8” CONVERSION KIT


50-0040 END EFFECTOR/
6” /8" EDGE GRIP END-EFFECTOR, 1.6MM THIN BLADE FOR 25-SLOT RANDOM ACCESS

6” SiC SORTER WITH FLIPPING
(TOP & BOTOTM MOUNT IOSS OCR)