· Support FOUP/FOSB/cassette.
· For 8" and 12" wafers.
· Communication: RS458, Ethernet
· Detects presence of two wafers in single slot.
· SMIF Loadport available too.
Illustration: works with 6" gravity aligner for reading SiC wafer's front and back side ID's.
The IOSS WID 120 wafer ID reader decodes all kind of OCR, barcode, data matrix codes and QR-codes from wafer e.g. from Si, GaAs, GaN, SiC
· Revolutionary integrated RGB illumination
· Fully automatic exposure control
· Code shift compensation
· High and fast reading ratesv
· Intelligent configurations handling
· Precise fine tuning
· Additional external RGB light source.
This 8” wafer tilt rotation station is designed for special wafers (thin and warped wafers or thick bonded wafers), it grabs only at the exclusion zone to free rotation and 245˚ tilt. It can be a stand-alone visual macro inspection and/or a sub-system to be integrated to your inspection system with simple TCP/IP communication.
· 8” wafer · 50~1600um thickness
· Silicon, glass or perforated wafers
· Contact within exclusion zone of < 3mm
· Ergonomic control panel with Joystick
· Automatic return to home position and for backside flip
· Handshake with most microscope models
· Wafer front side inspection (rotate, tilt and flip)
· Wafer edge inspeciton (rotate)
· Wafer back side inspection: edge grip, no blocking
