Wafer-Handling.com's end effector family provides a powerful wafer solution that integrates a high-precision mechanical device for all types of wafers, including thin, perforated, compound, glass, bare and polish wafers.
* Handles 50μm ~ 1200μm thick, bumped or perforated wafer
* ISO Class 1 cleanliness
* Optional: self-centering, top-pick
* Picks “potato-chip” and allowable wafer distortion up to 8mm
* Edge grip with SoftTouch mechanism
* Reapability≤30μm (Optional≤10μm)
EDGE GRIP END-EFFECTOR
300MM WAFER
U-SHAPE TYPE
EDGE GRIP END-EFFECTOR
300MM WAFER
U-SHAPE TYPE WITH TRHU-BEAM MAPPING SENSOR
EDGE GRIP END-EFFECTOR
300MM WAFER
SELF CENTERING
SPADE TYPE
EDGE GRIP END-EFFECTOR
200MM WAFER
SELF CENTERING
SPADE TYPE WITH SIDE THRU-BEAM MAPPING SENSOR
FOR 4-6 COORDINATE ROBOTS
EDGE GRIP END-EFFECTOR
300MM WAFER
SELF
CENTERING
U-SHAPE
FOR HIGH TEMP APPLICATION
TOP/BOTTOM APPROACH
THIN EDGE GRIP END-EFFECTOR
150/200MM WAFER
WITH FRONT ROTATION GRIPPING TIPS
SPLASH PROTECTED
FOR SUBMERGING IN WATER TANK
FOR 5-6 COORDINATE ROBOTS
EDGE GRIP END-EFFECTOR
125, 150 AND 200MM WAFER
SPLASH PROTECTED
FOR SUBMERGING IN WATER TANK
THIN EDGE GRIP END-EFFECTOR
150 AND 200MM WAFER
WITH FRONT ROTATION GRIPPING TIP
HIGH THROUGHPUT EDGE GRIP END-EFFECTOR
FOR 65MM DISK
SELF-CENTERING
EDGE GRIP END-EFFECTOR
300MM WAFER
TOP-APPROACH
SPADE TYPE WITH THRU-BEAM POSITIONING SENSOR
VORTEX END-EFFECTOR
150MM WAFER
SOFT TOUCH RESTRICTION TIPS
PHOTO ELECTRICAL WAFER PRESENCE SENSOR
VORTEX END-EFFECTOR
200MM WAFER
SOFT TOUCH RESTRICTION TIPS
PHOTO ELECTRICAL WAFER PRESENCE SENSOR
PADS
VORTEX END-EFFECTOR
300MM WAFER
SOFT TOUCH RESTRICTION TIPS
EDGE GRIP END-EFFECTOR
200 MM WAFER
SPADE TYPE WITH FLIPPER
EDGE GRIP END-EFFECTOR
300MM Wafer
SELF-CENTERING
WITH FLIPPER
200MM/300MM WAFER BRIDGE-TYPE
EDGE GRIP END-EFFECTOR
WITH FLIPPER AND THRU-BEAM MAPPING SENSOR