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12" 薄晶圆非接触式传输对准




50-0238 BERNOULLI ALIGNER
12” EDGE GRIP/ VORTEX SUPPORT ALIGNER, REPEATABILITY ± 25μm/0.02°



50-0132 BERNOULLI END EFFECTOR
12” EDGE GRIP/ VORTEX SUPPORT END-EFFECTOR, TOP/BOTTOM APPROACH

12”, ~200μm TAIKO、薄晶圆
EFEM用于晶圓缺陷檢測設備

8" 薄晶圆非接触式传输对准




50-0245 GRAVITY ALIGNER
8” EDGE GRIP/ VORTEX SUPPORT ALIGNER, REPEATABILITY ± 50μm/0.03°



50-0156 BERNOULLI END EFFECTOR
8” EDGE GRIP/ VORTEX SUPPORT END-EFFECTOR, TOP/BOTTOM APPROACH

8”、~150μmTAIKO、薄晶圆分选机
带翻转功能（顶部安装 IOSS OCR）

12" 透明玻璃晶圆非接触式高精度传输对准


50-0237 EDGE GRIP ALIGNER
12” EDGE GRIP ALIGNER, REPEATABILITY ± 25μm/0.02°, WITH FAST-SWAP BUFFERING



50-0023 END EFFECTOR
12” EDGE GRIP END-EFFECTOR, 3-POINT CENTERING, TOP/BOTTOM APPROACH

12” 玻璃晶圆正面取放晶圓EFEM用于
晶圓量測設備（顶部安装 IOSS OCR)

6" / 8" 碳化硅非接触式传输对准


50-0246 GRAVITY ALIGNER
6” GRAVITY ALIGNER, 100% STRESS FREE, WITH 8” CONVERSION KIT


50-0040 END EFFECTOR/
6” /8" EDGE GRIP END-EFFECTOR, 1.6MM THIN BLADE FOR 25-SLOT RANDOM ACCESS

6” /8" 碳化硅翻转分拣机
（顶部和底部安装 IOSS OCR）